Computer Science ›› 2016, Vol. 43 ›› Issue (2): 297-301.doi: 10.11896/j.issn.1002-137X.2016.02.062

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Method about Reconstruction of SEM Image Based on Gradient

MAO Xiang-di and SHI Zheng   

  • Online:2018-12-01 Published:2018-12-01

Abstract: Aiming at the problem about binaryzation of gray level image which is produced by scanning electron microscope(SEM) in the process of integrated circuit manufacturing,this paper put forward a method about reconstruction based on the gradient of SEM image and statistics.Otsu is used to analyze the noise of SEM image,and by means of smoothing,the gradient information of image is got with Kirsch operator.Then according to the feature that the gra-dient of outer edge is larger than inner edge,the algorithm uses statistic information to fill the image.Experimental results show that the algorithm has high stability and automation in high resolution images,and in low resolution images,it avoids the effect of edge extracting failing and produces correct binary image completely.

Key words: SEM image,Gradient,Kirsch operator,Statistics,Binaryzation

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