计算机科学 ›› 2016, Vol. 43 ›› Issue (2): 297-301.doi: 10.11896/j.issn.1002-137X.2016.02.062
毛项迪,史峥
MAO Xiang-di and SHI Zheng
摘要： 针对集成电路制造过程中由扫描式电子显微镜(Scanning Electron Microscope,SEM)产生的灰度图像二值化问题,提出一种利用图像边缘的梯度信息、通过统计重建SEM图像的方法。用Otsu方法分析SEM图像的噪声组成,通过滤波去噪过程,用Kirsch算子分析图像的梯度信息,再利用图像外边缘的梯度大于内边缘的梯度的特性,对每一个区域进行分类统计,根据统计信息进行最后的图像填充。实验结果表明,该算法在高分辨率的图像下显示出了高稳定性和高度自动化；在低分辨率的图像下,该方法有效避免了边缘提取失败带来的影响,能正确、完整地重建图像。
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